Microcantilevers: The millipede project

2006

2005

2004

2003

2002

2001

2000

1999

1998

Two-sensor-based H Control for Nanopositioning in Probe Storage
A. Pantazi, A. Sebastian, H. Pozidis, E. Eleftheriou
Proc. 44th IEEE Conf. on Decision and Control "CDC 2005," Seville, Spain, December 12-15, 2005, pp. 1174-1179.

An Analog Frontend Chip for a MEMS-based Parallel Scanning-Probe Data-Storage System
C. Hagleitner, T. Bonaccio, A. Pantazi, A. Sebastian, E. Eleftheriou
Proc. 2006 Symp. on VLSI Circuits, Honolulu, HI, June 15-17, 2006.

Integrating Nanotechnology into a Working Storage Device
A. Knoll, P. Bächtold, J. Bonan, G. Cherubini, M. Despont, U. Drechsler, U. Dürig, B. Gotsmann, W. Häberle, C. Hagleitner, D. Jubin, M.A. Lantz, A. Pantazi, H. Pozidis, H. Rothuizen, A. Sebastian, R. Stutz, P. Vettiger, D. Wiesmann, E. Eleftheriou
Microelectronic Engineering 83(4-9) (2006) 1692-1697.

Exploiting Chemical Switching in a Diels-Alder Polymer for Nanoscale Probe Lithography and Data Storage,
B. Gotsmann, U. Dürig, J. Frommer, C.J. Hawker
Adv. Functional Materials Vol. 16(11) (2006) 1499-1505.

Controlling Nanowear in a Polymer by Confining Segmental Relaxation
B. Gotsmann, U. Dürig, S. Sills, J. Frommer, C.J. Hawker
Nanoletters 6(2) (2006) 296-300.

Nano-Thermomechanics: Fundamentals and Application in Data Storage Devices
B. Gotsmann, U. Dürig
in Applied Scanning Probe Methods IV: Industrial Applications, B. Bhushan, H. Fuchs (Eds.), (Springer, Berlin, Heidelberg, 2006) 215-250 (invited).

A vibration resistant nano-positioner for mobile parallel-probe storage applications
M. A. Lantz, H. E. Rothuizen, U. Drechsler, W. Häberle, and M. Despont
Accepted IEEE/ASME Journal of Microelectromechanical Systems.

Scanning Probes Entering Data Storage: From Promise to Reality
Pozidis, H.; Bachtold, P.; Bonan, J.; Cherubini, G.; Eleftheriou, E.; Despont, M.; Drechsler, U.; Durig, U.; Gotsmann, B.; Haberle, W.; Hagleitner, C.; Jubin, D.; Knoll, A.; Lantz, M.A.; Pantazi, A.; Rothuizen, H.E.; Sebastian, A.; Stutz, R.; Wiesmann, D.W.
Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
10-13 Jan. 2006, 39-44.

A micromechanical thermal displacement sensor with nanometer resolution
Mark A. Lantz, Gerd K. Binnig, Michel Despont and Ute Drechsler
Nanotechnology 16 (2005) 1089-1094.

Nanopositioning for Probe Storage
A. Sebastian, A. Pantazi, G. Cherubini, E. Eleftheriou, M. A. Lantz, and H. Pozidis
To appear in Proc. of American Control Conference 2005 "ACC 2005," Portland, Oregon, June 2005.

Signal Processing for Probe Storage
H. Pozidis, P. Baechtold, G. Cherubini, E. Eleftheriou, C. Hagleitner, A. Pantazi, and A. Sebastian
Proc. of 2005 IEEE Int'l Conference on Acoustics, Speech, and Signal Processing "ICASSP 2005," Philadelphia, PA, March 2005.

Relaxation kinetics in nanostructured polymer films
W.P. King, G. Cross, and U. Dürig
to appear as a book chapter in "Applied Scanning Probe Methods II", Springer.

Capillary wave relaxation in thin polymer films
U. Dürig
Submitted to Phys. Rev. Lett.

Fundamentals of micro-mechanical thermo-electric sensors
U. Dürig
J. Appl. Phys. 98, 044906, 2005.

A servomechanism for a micro-electro-mechanical-system-based scanning-probe data storage device
A Pantazi, MA Lantz, G Cherubini, H Pozidis, E. Eleftheriou
Nanotechnology, Vol 15, (2004) S612.

Demonstration of Thermomechanical Recording at 641 Gbit/sq.in.
Haris Pozidis, Walter Haeberle, Dorothea W. Wiesmann, Ute Drechsler, Michel Despont, Tom Albrecht, Evangelos S. Eleftheriou
IEEE Transactions on Magnetics, Vol: 40 No: 4, pt. 2 pp 2531-6, (2004).

Wafer-Scale Microdevice Transfer/Interconnect: From a New Integration Method to its Application in an AFM-Based Data-Storage System
Michel Despont, Ute Drechsler, Roy R. Yu, B.H. Pogge, Peter Vettiger
Journal of Microelectromechanical Systems vol.13, no.6 : 895-901, Dec. 2004.

Thermally Activated Nanowear Modes of a Polymer Surface Induced by a Heated Tip
Bernd Gotsmann and Urs Duerig
Langmuir 2004, 20, 1495-1500.

Temperature dependent nano indentation of thin polymer films with the scanning force microscope
M. Hinz, A. Kleiner, S. Hild, O. Marti, U. Duerig, B. Gotsmann, U. Drechsler, T.R. Albrecht, P. Vettiger
European Polymer Journal 2004, European Polymer Journal 40(5): 957-964 (2004).

Millipede-A MEMS-based scanning-probe data-storage system
E. Eleftheriou, T. Antonakopoulos, GK Binnig, G. Cherubini, M. Despont, A. Dholakia, U. Duerig, M.A. Lantz, H. Pozidis, H.E. Rothuizen and P. Vettiger
IEEE Transactions on Magnetics, Vol. 39, No. 2, p938, 2003.

Carbon nanotube tips for thermomechanical data storage
MA Lantz, B Gotsmann, UT Duerig, P Vettiger, Y Nakayama, T Shimizu, H Tokumoto.
Applied Physics Letters, vol.83, no.6 : 1266-8 , 11 Aug. 2003.

A Nanotechnology-based Approach to Data Storage
E. Eleftheriou, , P.Baechtold, G. Cherubini, A. Dholakia, C. Hagleitner, T. Loeliger, A. Pantazi, H. Pozidis, T. Albrecht, GK Binnig, M. Despont, U. Drechsler, U. Duerig, B. Gotsmann, D Jubin, W Haeberle, M.A. Lantz H. Rothuizen, R. Stutz, P. Vettiger and D. Wiesmann,
Proceedings of VLDB, Berlin, 2003.

Thousands of microcantilevers for highly parallel and ultra-dense data storage
P. Vettiger, T. Albrecht, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, D. Jubin, W. Haberle, M.A. Lantz, H. Rothuizen, R. Stutz, D. Wiesmann, G.K. Binnig, P. Bachtold, G. Cherubini, C. Hagleitner, T. Loeliger, A. Pantazi, H. Pozidis, and E. Eleftheriou
Proc. IEEE International Electron Devices Meeting 2003 : 32.1.1-4, 2003.

AFM Based Mass Storage - The Millipede Concept
P. Vettiger, M. Despont, U. Duerig, M.A. Lantz, H.E. Rothuizen, G.K. Binnig
Ch. 28, Nanoelectronics and Information Technology, Wiley-VCH 2003, Weinheim.

Wafer-scale microdevice transfer/interconnect: from a new integration method to its application in an afm-based data-storage system
M. Despont, U. Drechsler, R. Yu, H.B. Pogge and P. Vettiger
TRANSDUCERS '03. Digest of Technical Papers, 1907-10 vol.2 , 2003.

Cantilevers with nano-heaters for thermomechanical storage application
U. Drechsler, N. Burer, M. Despont, M., U. Durig, B. Gotsmann, F. Robin, P. Vettiger
Micro- and Nano-Engineering 2002. 28th International Conference on Micro- and Nano-Engineering, 16-19 Sept. 2002, Lugano, Switzerland
Microelectronic Engineering vol.67-68, pp397-404, June 2003.

Micro/nanosystem technology for probe-based data storage
M. Despont and P. Vettiger
MST News no.3 : 10-12, June 2003.

Nano-Servomechanics of a MEMS Device for AFM-based Storage Technology
S. Sri-Jayantha, H. Dang, A. Sharma, E. Eleftheriou, M. Lantz and H. Pozidis
Proc. 2003 JSME-IIP/ASME-ISPS Joint Conf. on Micromechatronics for Information and Precision Equipment (IIP/ISPS Joint MIPE), Yokohama, Japan, June 16-18, 2003.

The "Millipede" - Nanotechnology Entering Data Storage
G. Binnig, G. Cherubini, M. Despont, U. Duerig, E. Eleftheriou, H. Pozidis, P. Vettiger
Handbook of Nanotechnology, Ed. Bharat Bhushan, Springer-Verlag, Berlin.

The Millipede - A Very Dense, Highly Parallel Scanning Probe Data Storage System G. Cherubini, T. Antonakopoulos, P. Bächtold, G. Binnig, M. Despont, U. Drechsler, A. Dholakia, U. Dürig, E. Eleftheriou, B. Gotsmann, W. Häberle, M.A. Lantz, T. Loeliger, H. Pozidis, H. Rothuizen, R. Stutz and P. Vettiger
Proc. 28th European Solid-State Circuit Conf., Firenze, Italy, September 24, 2002, 121.

The "millipede" - nanotechnology entering data storage
P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, W. M.A. Lantz, H.E. Rothuizen, R. Stutz and G.K. Binnig
IEEE Trans. Nanotechnol. Vol.1, No.1 March 2002 P39-55.

"Millipede": a MEMS based scanning probe data storage system
E. Eleftheriou, T. Antonakopoulos, G.K. Binnig, G. Cherubini, M. Despont, A. Dholakia, U. Durig, M. A. Lantz, H. Pozidis, H. Rothuizen, and P. Vettiger
Digest of the Asia Pacific Magnetic Recording Conference 2002.

Design of Atomic Force Microscope Cantilevers for Combined Thermomechanical Writing and Thermal Reading in Array Operation
W. P. King, T. W. Kenny, K. E. Goodson, G. L. W. Cross, Michel Despont, Urs T. Duerig, Hugo E. Rothuizen, Gerd K. Binnig, Peter Vettiger
Journal of Microelectromechanical Systems, Vol: 11 No: 6 pp 765-74, 2002.

CMOS sensor array with cell-level analog-to-digital conversion for local probe data storage
T. Loeliger, P. Bachtold, G.K. Binnig, G. Cherubini, U. Durig, E. Eleftheriou, P. Vettiger, M. Uster, H. Jackel,
ESSCIRC 2002. Proceedings of the 28th European Solid-State Circuit Conference : 623-6 , 2002.

Compact copper/epoxy-based electromagnetic scanner for scanning probe applications
H. Rothuizen, M. Despont, U. Drechsler, G. Genolet, W. Haberle, M. Lutwyche, R. Stutz and P. Vettiger
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) : 582-5, 2002.

Thermomechanical formation and thermal sensing of nanometer scale indentations in PMMA thin films for parallel and dense AFM data storage
Cross, G.L.W.; Despont, M.; Drechsler, U.; Durig, U.T.; Rothuizen, H.; Binnig, G.K.; Vettiger, P.; King, W.P.; Goodson, K.E.
Fundamentals of Nanoindentation and Nanotribology II. Symposium (Mater. Res. Soc. Symposium Proceedings Vol. 649) : Q2.3.1-6, 2001.

1000 tips for parallel and dense data storage
Vettiger, P.; Cross, G.; Despont, M.; Drechsler, U.; Durig, U.; Haberle, W.; Lutwyche, M.I.; Rothuizen, H.E.; Stutz, R.; Widmer, R.; Binnig, G.K.The "Millipede" -more than TRANSDUCERS '01. EUROSENSORS XV. 11th International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers : (vol.2) 1054-7, 2001.

Highly parallel data storage system based on scanning probe arrays
Lutwyche, M.I.; Despont, M.; Drechsler, U.; Durig, U.; Haberle, W.; Rothuizen, H.; Stutz, R.; Widmer, R.; Binnig, G.K.; Vettiger, P.
Applied Physics Letters vol.77, no.20 : 3299-301, 13 Nov. 2000.

Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications
Rothuizen, H.; Drechsler, U.; Genolet, G.; Haberle, W.; Lutwyche, M.; Stutz, R.; Widmer, R.; Vettiger, P.
Microelectronic Engineering vol.53, no.1-4 : 509-12, June 2000.

VLSI-NEMS chip for parallel AFM data storage
Despont, M.; Brugger, J.; Drechsler, U.; Durig, U.; Haberle, W.; Lutwyche, M.; Rothuizen, H.; Stutz, R.; Widmer, R.; Binnig, G.; Rohrer, H.; Vettiger, P.
Sensors and Actuators A (Physical) vol.A80, no.2 : 100-7, 10 March 2000.

Design of AFM cantilevers for combined thermomechanical data writing and reading
King, W.P.; Kenny, T.W.; Goodson, K.E.; Cross, G.; Despont, M.; Durig, U.; Lutwyche, M.I.; Rothuizen, H.; Binnig, G.K.; Vettiger, P.
Technical Digest. Solid-State Sensor and Actuator Workshop, pp. 1-5, 2000.

The "Millipede"-more than one thousand tips for parallel and dense AFM data storage
Vettiger, P.; Gross, G.; Despont, M.; Drechsler, U.; During, U.; Haberle, W.; King, W.P.; Lutwyche, M.I.; Rothuizen, H.; Stutz, R.; Widmer, R.; Binnig, G.K.
2000 Asia-Pacific Magnetic Recording Conference. Digests of APMRC2000 on Mechanical and Manufacturing Aspects of HDD, MC1/1-2, 2000.

"Millipede"-an AFM data storage system at the frontier of nanotribology
Durig, U.; Cross, G.; Despont, M.; Drechsler, U.; Haberle, W.; Lutwyche, M.I.; Rothuizen, H.; Stutz, R.; Widmer, R.; Vettiger, P.; Binnig, G.K.; King, W.P.; Goodson, K.E.
Tribology Letters vol.9, no.1-2 : 25-32, 2000.

Millipede-a highly-parallel dense scanning-probe-based data-storage system
Lutwyche, M.I.; Cross, G.; Despont, M.; Drechsler, U.; Durig, U.; Haberle, W.; Rothuizen, H.; Stutz, R.; Widmer, R.; Binnig, G.K.; Vettiger, P.
2000 IEEE International Solid-State Circuits Conference. Digest of Technical Papers, pp. 126-7, 450, 2000.

Ultra High-Density AFM Data Storage with Erase Capability
Gerd K Binnig, Michel Despont, Ute Drechsler, Walter Haeberle, Mark I Lutwyche, Peter Vettiger, H. J. Mamin, B. W. Chui, T. W. Kenny
Applied Physics Letters, v. 74, n. 9, p. 1329-31, 1999.

Planar micromagnetic x/y/z scanner with five degrees of freedom
Lutwyche, M.; Drechsler, U.; Haberle, W.; Rothuizen, H.; Widmer, R.; Vettiger, P.; Thaysen, J.
Proceedings of the Fifth International Symposium on Magnetic Materials, Processes, and Devices Applications to Storage and Microelectromechanical Systems (MEMS) : 423-33, 1999.

5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Häberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaralioglu and C. Quate
Sensors and Actuators A (Physical) vol.A73, no.1-2 : 89-94, 9 March 1999.

VLSI-NEMS chip for AFM data storage
Despont, M.; Brugger, J.; Drechsler, U.; Durig, U.; Haberle, W.; Lutwyche, M.; Rothuizen, H.; Stutz, R.; Widmer, R.; Rohrer, H.; Binnig, G.; Vettiger, P.
Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems, pp. 564-9, 1999.